The Microtronic EAGLEview™ auto Macro Inspection Module was developed to be added to our inspection and sorting systems. Combined with our PROCESSview wafer sleuthing software it provides full wafer images for root cause problem analysis over all process steps.

   FEATURES :

• High speed - up to 200 wafers per hour - enabling 100% inspection
• Macro defects (~50 micron) are detected
• Automatic recipe generater
• Robust Algorithms enable previous layer nonsense defect control
• Rescan wafers & write or tune recipes from stored images, eliminating wafer lot recall
• Wafer scan provides Defect List, Full Wafer Image & Wafer Defect Map for optimal documentation
• Automatic wafer pass/fail classification
• Small JPG image file size easily managed by Host network
• Exports standard format defect review file
• Available with microINSPECT and microSORT

Technical Specifications:

Wafer size flexibility	2, 4, 5, 6, 8 and 12 inch wafers
Standard defect size inspection	50 micron
Color Pixel-Level Threshold control	Maximizing detection of all defect types
Automated recipe generator	No operator intervention
Throughput	max 200 WPH
Reliability (Hardware)	MCBF - 35,000; MTBF - 2,000 hours
Uptime	98.5%
Clean Room compatibility	Class 1
Physical Dimensions	Width: 15", Depth: 12", Height: 10"

Application Examples:

(Above: CMP Scratches)

(Above: Tungsten Residual - Automatically Detected & Highlighted)

(Above: Tungsten Residual After Etch)

(Above: Full Wafer Image With Highlighted Defects)

(Above: Wafer Defect Map)