Reticle Tilt Defect

Reticle Tilt - Semiconductor Wafer Macro Defect Image

EAGLEview easily spots reticle tilt semiconductor wafer defects which may look similar to lens wafer defects. Typically, a reticle tilt macro wafer defect goes across a stepper shot while a lens macro wafer defect tends to show a difference within the stepper shot. In this case, the center of the lens field is different than the edge of the lens field.