Advanced Robotics, Microscopes with SITEview Software Automate Micro or Macro Defect Inspection
MicroINSPECT Semiconductor Wafer Defect Microscope Inspection System combines state-of-the-art robotics, intelligent microscopes and SITEview software to provide a flexible, easy-to-operate defect inspection platform for either micro or macro defect wafer inspection.
SITEview Software automates all microscope functions, metrology routines, and a wide variety of operations that make the wafer defect inspection process quicker and more accurate while minimizing operator errors.
The MicroINSPECT 300FA is an automated wafer inspection tool used for semiconductor wafer failure analysis. Its small footprint, high speed, and low cost relative to its rich features yield a superb cost of ownership and makes this an ideal tool for your fab or failure analysis lab. The MicroINSPECT 300FA combines advanced robotics, wafer sorting, an intelligent wafer inspection microscope together with SiteVIEW Software to produce an integrated failure analysis tool.
MicroINSPECT 300FA is fully integrated with SiteVIEW Software, which gives you the power to act fast, be flexible, and solve critical issues before it’s too late.
SITEview Software Applications that Run on the MicroINSPECT 300FA Include:
Failure Analysis Navigation Programs
User Customizable Screens
Automated “manual load” mode for single wafer or wafer piece loading with Deskew
Defect Review & Inspection– visit defect sites using defect review file data
Complete Wafer Sorter
Second Optical Inspection
Image Storage, Retrieval and Database
Host Communication — LANs,
All Major Microscope Interface (Zeiss, Nikon, Leica, others)
MicroINSPECT 300FA Custom Configurations
One Bridge Tool for Both 200 & 300mm semiconductor wafers. Automatic wafer size recognition. No calibration needed.
1 or 2 Cassette Platforms for manual loading in Failure Analysis Lab
FOUP indexers available
OCR – Dual wafer ID recognition Alpha-numeric for 200mm and 2D Matrix for 300mm
Photonic Laser Marker Compatible
Zeiss Optics – BF, DF, DIC, VIS & UV Confocal modes with 80-100nm visibility
Can integrate with all major microscope brands including existing microscopes
Hi-Precision Stage with embedded 12″ x 12″ reticle for maximum accuracy
Hi Res Flat Panel Display
MicroINSPECT 300FA Semiconductor Wafer Defect Inspection Platform Equipment Features
Active Mini Environment, Passive Enclosure or open Table Top Workstation
Mounted on Casters and Extendable Leveling Posts for Mobility