Microtronic ProcessGuard Semiconductor Wafer Defect Inspection Management Software

Automate Your Macro Defect Semiconductor Wafer Inspection Processes and Equipment

ProcessGuard auto macro semiconductor wafer defect inspection software gives you the flexibility and control over your defect wafer inspection process by unleashing the power to customize your user interface and application features to exactly what your semiconductor wafer defect inspection production process requires.

ProcessGuard Software running on EAGLEview is a high-throughput auto macro inspection tool that inspects 100% of the manufactured semiconductor wafers. All lot wafer-to-wafer macro variations are identified and logged. ProcessGuard Software manages high resolution full-sized wafer images and data from EAGLEview that provides the critical information to make immediate, cost-saving, and yield-protecting corrective decisions in the most timely manner.

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EAGLEview Automated Macro Defect Semiconductor Wafer Inspection Equipment
ProcessGuard Wafer Defect Inspection Management Software

ProcessGuard Software | Semiconductor Wafer Defect Inspection Management

Microtronic ProcessGuard Software is the desktop client for the EAGLEview auto macro wafer defect inspection system. ProcessGuard is a high volume, high speed semiconductor wafer defect inspection management solution that provides an easy-to-use, customizable and extensible platform and interface to automate your fabs defect inspection process. ProcessGuard is feature rich (see below) and its newest releases include complete wafer randomization software, a user-defined defect library, and an integrated trainer and knowledge base.

Microtronic ProcessGuard Software running on EAGLEview enables unique capabilities and applications to speed your wafer inspection processes and provide a more accurate and efficient overall testing environment.

Key Capabilities, Applications, and Features of ProcessGuard Software Running on an EAGLEview System include:

  • Desktop Client for EAGLEview
  • Wafer Randomization Analysis Software
  • Integrated User-Defined Defect Libary
  • Integrated Trainer & Knowledge Base
  • High Volume Macro Inspection tool which inspects 100% of semiconductor wafers
  • SITEview Software Integrated
  • Feature Rich, Customizable User Interface
  • Customizable Query Screens

Wafer Defect Inspection Data Management

  • Compiled Lot Lists
  • Data Can be Sorted by Class Codes, Tools, Log Points, Time, or Device
  • Lot and Equipment Historical Data
  • Unique Drill-Down Capability for Root Cause Analysis
  • Incoming and Outgoing Slot Order
  • Edge Bead Removal Review (EBR)
  • View Multiple Log Points for Each Wafer

Applications and Processes:

  • Defect Overlay
  • KLARF File Compatibility
  • PARETO Analysis
  • Guard-Banding (ink-off)
  • Bump Process
  • CMP
  • Defect Review
The Same Semiconductor Wafer Can be Viewed From Multiple Log Points
The Same Semiconductor Wafer Can be Viewed From Multiple Log Points
ProcessGuard Enables Defect Review Overlay and Guard Banding at Multiple Levels
ProcessGuard Enables Defect Review Overlay and Guard Banding at Multiple Levels
ProcessGuard Allows you to Inspect, View, and Image Multiple Layers of Each Wafer
ProcessGuard Allows you to Inspect, View, and Image Multiple Layers of Each Wafer