Here is an example of a scratch on a 200mm semiconductor wafer that was made by a machine as opposed to a person. Scratch macro defects appear as a straight line or curve that was made by a machine or robot handler.
EAGLEview found this scratch which was made by a robot wafer handler. In this wafer image, EAGLEview makes it very clear where the scratch is and you can see the scratch curving across the semiconductor wafer.
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The GPC signal is honored.
Scratches By Machine
Scratches By Machine
Here is an example of a scratch on a 200mm semiconductor wafer that was made by a machine as opposed to a person. Scratch macro defects appear as a straight line or curve that was made by a machine or robot handler.
EAGLEview found this scratch which was made by a robot wafer handler. In this wafer image, EAGLEview makes it very clear where the scratch is and you can see the scratch curving across the semiconductor wafer.
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