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Excursion Control
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Microtronic is a leader in Semiconductor Wafer Defect Inspection, Sorting and Metrology.
Excursion Control
The EAGLEview automated macro inspection platform provides unprecedented excursion control within the fab. EAGLEview inspections are fast enough to do macro inspection on 100% of the wafers in every lot at many process steps, enabling a fab to catch more intermittent low-level defects. For additional information on inspection sampling and excursion control, see Technical Bulletin #4-5.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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