Example of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.
Single Line Spin Macro Defect Detected by Microtronic EAGLEview
Spin Defect – Line
Spin Defect – Line
Example of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.
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