The EAGLEview automated macro inspection platform provides unprecedented excursion control within the fab. EAGLEview inspections are fast enough to do macro inspection on 100% of the wafers in every lot at many process steps, enabling a fab to catch more intermittent low-level defects. For additional information on inspection sampling and excursion control, see Technical Bulletin #4-5.
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The GPC signal is honored.
Excursion Control
The EAGLEview automated macro inspection platform provides unprecedented excursion control within the fab. EAGLEview inspections are fast enough to do macro inspection on 100% of the wafers in every lot at many process steps, enabling a fab to catch more intermittent low-level defects. For additional information on inspection sampling and excursion control, see Technical Bulletin #4-5.
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