A poly haze macro defect appearing on a semiconductor wafer is caused by a poly deposition process problem that can be easily detected by the EAGLEview system. The poly haze macro defect appears as a bright spot on the semiconductor wafer’s edge. The wafer macro defect may effect a single wafer or many wafers in the lot as can be seen by the images above.
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Poly Haze Macro Defect
Poly Haze Macro Defect
A poly haze macro defect appearing on a semiconductor wafer is caused by a poly deposition process problem that can be easily detected by the EAGLEview system. The poly haze macro defect appears as a bright spot on the semiconductor wafer’s edge. The wafer macro defect may effect a single wafer or many wafers in the lot as can be seen by the images above.
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