EagleView easily spots reticle tilt semiconductor wafer defects which may look similar to lens wafer defects. Typically, a reticle tilt wafer macro defect goes across a stepper shot while a lens wafer macro defect tends to show a difference within the stepper shot. In this case, the center of the lens field is different than the edge of the lens field.
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Reticle Tilt Defect
Reticle Tilt Defect
EagleView easily spots reticle tilt semiconductor wafer defects which may look similar to lens wafer defects. Typically, a reticle tilt wafer macro defect goes across a stepper shot while a lens wafer macro defect tends to show a difference within the stepper shot. In this case, the center of the lens field is different than the edge of the lens field.
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