Example of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.
Single Line Spin Macro Defect Detected by Microtronic EAGLEview
This website uses cookies and other tracking technologies to gather information about you, your device, and how you interact with this website to better understand how visitors use the site and to offer you a more personalized experience. We may share information about your use of this site with our social media, marketing, security and analytics partners. By continuing to use this website, you agree to these practices. For more information, please see our Privacy Notice.
Select “Accept All” to allow all of these technologies and uses or “Required Only” to limit ones that are not essential. If you select “Required Only” it only applies to this website, and only to the browser and device you are using at the time you make the selection. If you clear cookies on your browser, you will need to make your selection again.
The GPC signal is honored.
Spin Defect – Line
Spin Defect – Line
Example of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
Navigation
Share on Social Media