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Wafer Hotspot Defects
Wafer Hotspot Defects
A hotspot macro defect is a localized area that is out of focus and may be due to a particle on the backside of the wafer or a particle on the stepper chuck.
Image of a hotspot macro defect identified by an EAGLEview inspection.
Another representative example of a large hotspot identified and imaged during an EAGLEview automated defect inspection.
Download Microtronic Macro Defect Brochure
Microtronic Overview Video
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