Wafer Hotspot Defects

HOTSPOT - Semiiconductor Wafer Macro Defect Image - 1

A hotspot macro defect is a localized area that is out of focus and may be due to a particle on the backside of the wafer or a particle on the stepper chuck.

HOTSPOT - Semiiconductor Wafer Macro Defect Image - 2

Image of a hotspot macro defect identified by an EAGLEview inspection.

HOTSPOT - Semiiconductor Wafer Macro Defect Image - 3

Another representative example of a large hotspot identified and imaged during an EAGLEview automated defect inspection.