Microtronic Announces the EAGLEview model EV6 Macro Inspection Platform

FOR IMMEDIATE RELEASE

Microtronic Announces the EAGLEview model EV6 Macro Inspection Platform

Hawthorne, NY – July 5, 2023 – SEMICON West 2023 – Microtronic, maker of high-speed full-wafer macro defect inspection systems and software, has just announced an innovative new EAGLEview model EV6. The EV6 replaces the EV5 which was the winner of the Best of West award at SEMICON West in 2017. EV6 has a redesigned imaging system for separate brightfield and darkfield settings for optimized lighting, drastically improving defect detection on dark wafers. Microtronic will be giving live software demonstrations of the new EV6 imager at SEMICON West 2023 next week in booth #434.

Traditionally, full wafer color images at early levels remain challenging, the wafers will appear very dark or even black. “The EV6 redesigned imaging system will be a game-changer for automated macro inspection of wafers at early or implant levels,” said Microtronic Applications Director Errol Akomer. “The brighter multi-angle illumination improves scratch and stain detection, wafer to wafer overlay, and is particularly useful for levels where the wafers appear very dark.”

Introducing EAGLEview EV6
Examples of the brighter multi-angle illumination on the newly released EAGLEview EV6…

Akomer noted that the EV6includes new software algorithms which improve defect detection on both the frontside and backside images.

EAGLEview performs high speed automated macro inspection on wafer frontside/backside without the need for device dependent recipes. As an added bonus, customers also have EAGLEview perform advanced sorting routines automatically after the macro inspection. Akomer also noted that the EV6 imager and software algorithms are field-retrofittable for existing EAGLEview EV5 tools.

About Microtronic

Founded in 1994 and headquartered in Hawthorne, NY, Microtronic designs, builds and delivers advanced systems and software for automated macro wafer defect inspection and data management for semiconductor processing. The company’s flagship macro defect inspection system, the EAGLEview 5, is known for its unprecedented speed, which enables it to automatically inspect 100% of every wafer in the lot without recipes. It produces high-resolution full-wafer color images with macro defects identified and it stores all the information in the powerful ProcessGuard defect database and management system. ProcessGuard clients are available throughout the organization with unlimited licenses.

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