Trans-Imager | Translating process images into significant tool-defect reduction

Real-time, tool-specific defectivity data

Now there is a way to monitor defectivity on individual processing tools – automatically – in real-time. Microtronic’s new Trans-Imager software module is able to take high-resolution images directly from your processing equipment and immediately detect and display
macro wafer defects – transferring all of that information into our powerful and long-proven ProcessGuard software, which provides a wealth of defect management and analysis. This new capability is called ProcessGuard Xtensis (PGX) because it extends the power of ProcessGuard software to fab tools that previously had no way to detect defects. This provides an important new stream of defect data.

Microtronic’s new Trans-Imager software

Trans-Imager Software | A powerful defect management system

Trans-Imager puts all of your information into the macro-image database, and ProcessGuard software makes it immediately accessible across the entire fab. Tool defect data is searchable by date, time, lot, wafer, and more. So, even months later, specific process issues can
be quickly and easily reviewed.

Microtronic Trans-Imager Software – Zoomed-in view of defects

ProcessGuard is a high-speed, high-volume solution that delivers an easy-to-use and extendable means of integrating and managing all of your fab’s inspection processes. It provides the flexibility to customize the user interface and application features to your needs. It includes a user-definable defect library, a slot-positional analysis tool, the ability to guardband wafers at probe, and a great deal more. Now, all the capability and intelligence of ProcessGuard can be applied directly to specific processes in your fab.

Trans-Imager Software Features :