Flashfield Defects

FLASHFIELD  - Semiiconductor Wafer Macro Defect Image - 1

Flash field defects are typically near the edge of the semiconductor wafer and due to a focus isssue for a stepper shot or possibly a topography issue.

FLASHFIELD  - Semiiconductor Wafer Macro Defect Image - 2

Some flash field macro defects may occur in the interior of the wafer – these macro defects are also referred to as a dropped or missing shot.

FLASHFIELD  - Semiiconductor Wafer Macro Defect Image - 3

Additional example of a flash field defect on the semiconductor wafer.

FLASHFIELD  - Semiiconductor Wafer Macro Defect Image - 4

Additional example of a flash field macro defect on the semiconductor wafer.