Scratches By Machine

Here is an example of a scratch on a 200mm semiconductor wafer that was made by a machine as opposed to a person. Scratch macro defects appear as a straight line or curve that was made by a machine or robot handler.

EAGLEview found this scratch which was made by a robot wafer handler. In this wafer image, EAGLEview makes it very clear where the scratch is and you can see the scratch curving across the semiconductor wafer.