Poly Haze Macro Defect

Poly Haze Deposition  - Semiconductor Wafer Macro Defect Image - 1

A poly haze macro defect appearing on a semiconductor wafer is caused by a poly deposition process problem that can be easily detected by the EAGLEview system. The poly haze macro defect appears as a bright spot on the semiconductor wafer’s edge. The wafer macro defect may effect a single wafer or many wafers in the lot as can be seen by the images above.