Defect Library

Archive for the ‘Defect Library’ Category

Partial Pattern – No Expose

Poly Haze Macro Defect A poly haze macro defect appearing on a semiconductor wafer is caused by a...

Particle Defects    

Missing Patterns Missing pattern wafers can sometimes be seen in the thumbnail images that are generated in the...

Lens Stepper Macro Defects   A lens stepper macro defect may look similar to a reticle tilt caused...

Wafer Hotspot Defects A hotspot macro defect is a localized area that is out of focus and may...

First 12 Wafers – Different Occasionally half of the semiconductor wafers in a lot that are inspected are...

Flashfield Defects Flash field defects are typically near the edge of the semiconductor wafer and due to a...

Wafer Edge Discoloration EAGLEview image of a semiconductor wafer with a discoloration macro defect on the edge of...

Developer Related Defects Semiconductor wafer macro defect caused by poor develop or a poor rinse during the wafer...