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Spin Defect – Line
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Spin Defect – Line
Spin Defect – Line
Example of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.
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Gallery of Macro Defects Detected By EAGLEview
Reticle Tilt Defect
Spin Defect – Line
Spin Defect – Entire Wafer
Spin Defect on Edge
Center Spin Macro Defect
Scratches By Machine
Scratches By Human
Rework – Yield Improvement
Rework – Scrap Avoidance
Previous Layer Defects
Partial Pattern – No Expose
Poly Haze Macro Defect
Particle Defects
Missing Patterns
Lens Stepper Macro Defects
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