Spin Defect – Line

SPIN DEFECT SINGLE LINE - Semiconductor Wafer Macro Defect Image - 1

EAExample of single line spin macro defect detected by EAGLEview. This macro defect is sometimes referred to as a comet because it may be induced by a particle that causes the resist to flow around the defect during the spin operation.

SPIN DEFECT SINGLE LINE - Semiconductor Wafer Macro Defect Image - 2
Single Line Spin Macro Defect Detected by Microtronic EAGLEview